Automatic Semiconductor Wafer Transfer Mechanism
【Machine Name】
Automatic Semiconductor Wafer Transfer Mechanism
【Overview】
A system that automatically supplies semiconductor wafers to an inspection machine.
It takes wafers out of the carrier, corrects their position through pre-alignment, and feeds them to the inspection unit. After inspection, wafers are automatically unloaded and returned to their original positions in the carrier.
A vibration isolation mechanism prevents vibration during inspection.
【Specifications & Features】 ■ Fully enclosed clean inspection environment with FFU (fan filter unit)
■ Vibration isolation mechanism
■ Automatic wafer presence detection
■ Pre-alignment mechanism: XY-axis stroke ±2 mm or more, θ-axis stroke ±15° or more, vacuum chuck table
■ Wafer changeover tact time: 60 s
■ Positive pressure: approx. 26.6 × 10³ Pa
■ QR code reading: Lot information
