Imprint System
2 days ago
1 min read
A system built by RISE ONE under the supervision of AIST (Tsukuba) and the Minimal Fab Development Association.
【Machine Name】
Imprint System
【Overview】
A system built by RISE ONE under the supervision of AIST (Tsukuba) and the Minimal Fab Development Association.
【Specifications & Features】
■ Target workpiece material: Silicon, GaAs
■ Size: Min. φ12.5 mm, Max. φ100 mm
■ Fixing method: Mechanical clamping with holding parts
■ Replica mold material: PDMS / thermoplastic resin
■ Transfer mechanism
■ Drive: Pulse motor
■ Load sensor: Piezoelectric element (1 N resolution)
■ Load: Adjustable up to 1 kN
■ Load setting: Parameter input (max. 1 kN)
■ Pressing resolution: 0.1 µm
