Minimal Mask Aligner
3 days ago
1 min read
A system built by RISE ONE under the supervision of AIST (Tsukuba) and the Minimal Fab Development Association.
【Machine Name】
Minimal Mask Aligner
【Overview】
A system built by RISE ONE under the supervision of AIST (Tsukuba) and the Minimal Fab Development Association.
【Specifications & Features】
■ 5-megapixel camera optics for front and back alignment marks
■ 2-megapixel camera optics for orientation flat detection
■ XYZ alignment axis resolution: 0.1 µm
■ θ-axis resolution: 8 arcseconds
■ Exposure gap freely adjustable with 0.1 µm resolution
■ Soft contact (pressure detection by load cell)
■ Hard contact (air lift)
